Configuration

• Operation Voltage:

  • High Tension SEM: 200 V - 30 kV

  • High Tension FIB: 2 kV - 30 kV      

• Source

  • FEG (Schottky)

  • Gallium Liquid Metal Ion Source

• Imageing Detectors:

  • TLD SE, ETD, BSE, CDEM

  • STEM detector

• Spectroscopy

  • EDX detector

• Gas Injection System (GIS)

  • C, Pt, and W

  • XeF₂ for selective etch enhancing

• Manipulators

  • Omniprobe 200 with independent x,y, z motion

  • Flip-stage

Resolution

Imaging, Analysis and Sample Preparation Techniques      

• SE & BSE SEM analysis

• STEM imaging

• EDX analysis

• 3D Slice & View tomography

• TEM sample preparation

• Nanoscale deposition and contacting